Measurement Technology for Micro-Nanometer Devices
Автор:Zongmin Ma
Описание книги
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices
Тип:PDF Книга
Цена:14475.68 руб.
Язык: Английский
Просмотры: 136
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